Five-axis vacuum electric drive
This high-precision vacuum detection assembly is equipped with a five-axis full closed-loop displacement platform and an ultra-high vacuum chamber, integrating a wide-frequency radio frequency detection probe. It features low magnetic permeability and ultra-high vacuum sealing characteristics, enabling multi-dimensional precision adjustment and is suitable for precise detection of accelerator beam longitudinal parameters.
(1) Five-axis grating full closed-loop displacement stage, enabling multi-dimensional precision positioning adjustment at micron/arcsecond level.
(2) 316LN low-magnetic stainless steel vacuum chamber, with overall magnetic permeability ≤1.05 and excellent ultra-high vacuum sealing performance.
(3) TZM molybdenum alloy broadband RF probe, supporting low-loss and stable signal transmission up to 20GHz with precise 50Ω impedance matching.
| Overall magnetic permeability of vacuum chamber | ≤1.05 |
| Ultimate overall vacuum degree | ≤1×10-6 Pa |
| Total leakage rate of vacuum inspection | ≤2×10-11 Pa·m3/s |
| X-axis travel range / adjustment precision Z-axis travel range / adjustment precision | ±5mm / ±0.01mm |
| Y-axis travel range / adjustment precision | 120mm / ±0.03mm |
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